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Magnetic Field Analysis of Permanent Magnet in Magnetron Sputtering Vacuum Device
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    Abstract:

    A solution to the high energy consumption issue of existing vacuum suction devices was proposed by integrating a magnetic control expansion vacuum generation and suction system.Magnetic field simulations were conducted using COMSOL to analyze the effects of different magnetic block shapes,distribution radii,and axial distances on the axial magnetic forces between permanent magnets.The simulation results indicate that among the four selected magnet arrangements,the cylindrical magnet arrangement exhibits the strongest axial magnetic force; to achieve maximum axial magnetic force,the magnets need to be separated; however,further increasing the distribution radius results in negligible changes on the magnetic force Fτ.Experiments were conducted using N38 neodymium-iron-boron cylindrical magnets with a thickness of 10 mm and a diameter of 20 mm.The magnetic forces at different axial distances and distribution radii were measured.The experimental results validate the simulation outcomes,demonstrating that the absolute value of the magnetic force between magnets is negatively correlated with the axial distance; when the axial distance is 5 mm and the distribution radius is 17 mm,the maximum magnetic attraction force is 109.7 N,and the maximum magnetic repulsion force is 88.71 N,satisfying the operational requirements of the magnetically controlled vacuum expansion device.

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郭宏宇,滕燕,胡万兴.磁控式真空装置中永磁体的磁场分析[J].机床与液压英文版,2024,52(19):146-152.

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  • Received:
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  • Online: October 23,2024
  • Published: October 15,2024
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