Vacuum handling system which property directly affects working condition of palletizing manipulator is the important component of palletizing manipulator. A suitable solution for vacuum handling system is an effective way to improve efficiency of the palletizing manipulator. Based on SMC pneumatic components, for the palletizing manipulator, a solution that single vacuum suction combinated with single vacuum generator for vacuum handling system was proposed. Then corresponding diagnostic methods and treatment processes were given for its typical failures.