As to the problem that special tools variety and knifeedge are very difficult to work out by normal tool grinder and traditional production technics, a kind of selfdeveloped fiveaxis CNC tool grinder was created. What’s more, the performance of grinder was affected by the stress and deformation of linear feed system. The stress and deformation of linear feed system were analyzed by Solidworks Simulation. The results show that the maximum stress of the Xaxis worktable is 2 MPa, which appears on the lower part of the slider and the column of Xaxis table, and the maximum displacement of the Xaxis worktable is 0000 015 88 mm, which appears in the middle of the column. On the Yaxis workbench, the maximum stress is 2 MPa, which appears in the middle of the Yaxis table, and the maximum displacement of the Yaxis table is 0000 003 584 mm, which appears in the middle of the Yaxis table; On the Zaxis workbench, the maximum stress is 103 MPa, which appears on the right side of the Zaxis table, and the maximum displacement of the Zaxis table is 0000 030 88 mm, which appears in the middle of the Zaxis table.