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磁控式真空装置中永磁体的磁场分析
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Magnetic Field Analysis of Permanent Magnet in Magnetron Sputtering Vacuum Device
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    摘要:

    针对现有真空吸取装置高能耗问题提出一种磁控式扩容真空发生-吸取集成的解决方案。通过COMSOL进行磁场仿真分析,研究不同磁块形状、分布半径和轴向距离对轴向永磁体之间磁力的影响。仿真结果显示:在选定的4种磁块排布方式中,圆柱体磁块排布方式的轴向磁力最大,且磁块之间需要分离排布才能实现最大的轴向磁力,但分布半径进一步增加,磁力Fτ变化量较小,可以忽略不计。采用N38钕铁硼磁块、厚度10 mm、直径ϕ20 mm的圆柱体磁块进行试验,测量磁块不同轴向距离和分布半径下磁力的大小。试验结果验证了仿真结果,同时表明:磁块间的磁力绝对值与轴向距离成负相关;轴向距离为5 mm、分布半径为17 mm时产生的最大磁吸力为109.7 N,最大磁斥力为88.71 N,可以满足磁控式扩容真空装置的工作需求。

    Abstract:

    A solution to the high energy consumption issue of existing vacuum suction devices was proposed by integrating a magnetic control expansion vacuum generation and suction system.Magnetic field simulations were conducted using COMSOL to analyze the effects of different magnetic block shapes,distribution radii,and axial distances on the axial magnetic forces between permanent magnets.The simulation results indicate that among the four selected magnet arrangements,the cylindrical magnet arrangement exhibits the strongest axial magnetic force; to achieve maximum axial magnetic force,the magnets need to be separated; however,further increasing the distribution radius results in negligible changes on the magnetic force Fτ.Experiments were conducted using N38 neodymium-iron-boron cylindrical magnets with a thickness of 10 mm and a diameter of 20 mm.The magnetic forces at different axial distances and distribution radii were measured.The experimental results validate the simulation outcomes,demonstrating that the absolute value of the magnetic force between magnets is negatively correlated with the axial distance; when the axial distance is 5 mm and the distribution radius is 17 mm,the maximum magnetic attraction force is 109.7 N,and the maximum magnetic repulsion force is 88.71 N,satisfying the operational requirements of the magnetically controlled vacuum expansion device.

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郭宏宇,滕燕,胡万兴.磁控式真空装置中永磁体的磁场分析[J].机床与液压,2024,52(19):146-152.
GUO Hongyu, TENG Yan, HU Wanxing. Magnetic Field Analysis of Permanent Magnet in Magnetron Sputtering Vacuum Device[J]. Machine Tool & Hydraulics,2024,52(19):146-152

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  • 在线发布日期: 2024-10-23
  • 出版日期: 2024-10-15
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