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蓝膜固定面积可调式顶针罩设计与仿真分析
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国家重点研发计划(2018YFB1501203);山东省重点研发计划(2019GGX104001);山东省自然科学基金(ZR2019MEE076);山东省高等学校青创科技支持计划(2019KJB031)


Design and Simulation Analysis of Blue Tape Fixed Area Adjustable Needle Cover
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    摘要:

    针对现有关于芯片剥离研究大多集中在顶针的结构设计和多顶针布置以及剥离工艺参数上,而忽略顶针罩以及顶针罩相关工艺参数在芯片剥离过程中影响的问题,设计一款蓝膜固定面积可调式顶针罩装置,该装置通过顶针罩内部气路的结构变换实现蓝膜固定面积的调节。随后利用正交试验方法分析了蓝膜固定面积和蓝膜底部真空吸附力这两个工艺参数对芯片剥离的影响,得出了蓝膜固定面积对芯片剥离的影响是蓝膜底部真空吸附力10倍的结论,验证了设计装置的必要性。随后利用ANSYS软件中的流体模块,分析和验证了这种可调节蓝膜固定面积顶针罩装置的可行性。

    Abstract:

    In view of the fact that the current research on chip stripping is mostly focused on the structural design,arrangement of needle and stripping process parameters,while the influence of needle cover and the process parameters associated with needle cover in the process of chip stripping is ignored,a blue tape fixed area adjustable needle cover device was designed,the fixed area of blue tape was adjusted through the structural transformation of the internal gas path of the needle cover.Then orthogonal experimental method was used to analyze the influence of the fixed area of the blue tape and the vacuum adsorption at the bottom of the blue tape on the chip stripping.It is concluded that the influence of the fixed area of the blue tape on the chip peeling is ten times that of the vacuum adsorption at the bottom of the blue tape.The necessity of designing the device is verified.Then the feasibility of the adjustable blue tape fixed area needle cover device is analyzed and verified by using the fluid module in ANSYS software.

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王战中,李旭龙,袁亚强.蓝膜固定面积可调式顶针罩设计与仿真分析[J].机床与液压,2023,51(7):116-121.
WANG Zhanzhong, LI Xulong, YUAN Yaqiang. Design and Simulation Analysis of Blue Tape Fixed Area Adjustable Needle Cover[J]. Machine Tool & Hydraulics,2023,51(7):116-121

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  • 在线发布日期: 2023-04-27
  • 出版日期: 2023-04-15