Abstract:Servo drive system is a core part of industrial robots; it has always been a research emphasis of industrial robots and computer numerical control (CNC) system manufacturers. In order to further increasing performance of servo drive systems by applying the new technique and new functional unit in product design, situation and prospect of drive system for industrial robots and latest research results of motors, drivers and rotary encoder, and other main parts are described according to mastered data materials. The structure principle and technical features of servo actuators, direct drive motors and modular encoders were detailed described. The experimental results show that, the high-speed, high-precision, miniaturization, integration and networked are orientation of technological development of modern servo drive system; and prospects of future study with open problems are identified as well.